翻訳と辞書 |
Scanning Helium Ion Microscope : ウィキペディア英語版 | Scanning Helium Ion Microscope A Scanning Helium Ion Microscope (SHIM, HeIM or HIM) is a new imaging technology based on a scanning helium ion beam.〔(NanoTechWire.com Press Release: ''ALIS Corporation Announces Breakthrough in Helium Ion Technology for Next-Generation Atomic-Level Microscope'' ), December 7th, 2005 (retrieved on November 22nd, 2008)〕 This technology has several advantages over the traditional scanning electron microscope (SEM). Due to the very high source brightness, and the short De Broglie wavelength of the helium ions, which is inversely proportional to their momentum, it is possible to obtain qualitative data not achievable with conventional microscopes which use photons or electrons as the emitting source. As the helium ion beam interacts with the sample, it does not suffer from a large excitation volume, and hence provides sharp images on a wide range of materials. Compared to a SEM, the secondary electron yield is quite high, allowing for imaging with currents as low as 1 femtoamp. The detectors provide information-rich images which offer topographic, material, crystallographic, and electrical properties of the sample. In contrast to other ion beams, there is no discernible sample damage due to relatively light mass of the helium ion. The drawback is the cost. Since 2007 this technology is commercialized and instruments have been shipped to customers.〔(Carl Zeiss SMT Press Release: ''Carl Zeiss SMT Ships World’s First ORION Helium Ion Microscope to U.S. National Institute of Standards and Technology'' ), July 17th, 2008 (retrieved on November 22nd, 2008)〕 A surface resolution of 0.24 nanometers has been demonstrated.〔(Fabtech.org: ''Microscopy resolution record claimed by Carl Zeiss'' ), November 21st, 2008 (retrieved on November 22nd, 2008)〕〔(Carl Zeiss SMT Press Release: ''Carl Zeiss Sets New World Record in Microscopy Resolution Using Scanning Helium Ions'' ), November 21st, 2008 (retrieved on November 22nd, 2008)〕 == See also ==
* Microscope * Atomic nano-scope
抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)』 ■ウィキペディアで「Scanning Helium Ion Microscope」の詳細全文を読む
スポンサード リンク
翻訳と辞書 : 翻訳のためのインターネットリソース |
Copyright(C) kotoba.ne.jp 1997-2016. All Rights Reserved.
|
|